JPH0447958Y2 - - Google Patents

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Publication number
JPH0447958Y2
JPH0447958Y2 JP1985091516U JP9151685U JPH0447958Y2 JP H0447958 Y2 JPH0447958 Y2 JP H0447958Y2 JP 1985091516 U JP1985091516 U JP 1985091516U JP 9151685 U JP9151685 U JP 9151685U JP H0447958 Y2 JPH0447958 Y2 JP H0447958Y2
Authority
JP
Japan
Prior art keywords
waveguide
plasma
microwave
section
horn
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985091516U
Other languages
English (en)
Japanese (ja)
Other versions
JPS622245U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985091516U priority Critical patent/JPH0447958Y2/ja
Publication of JPS622245U publication Critical patent/JPS622245U/ja
Application granted granted Critical
Publication of JPH0447958Y2 publication Critical patent/JPH0447958Y2/ja
Expired legal-status Critical Current

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  • Drying Of Semiconductors (AREA)
JP1985091516U 1985-06-19 1985-06-19 Expired JPH0447958Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985091516U JPH0447958Y2 (en]) 1985-06-19 1985-06-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985091516U JPH0447958Y2 (en]) 1985-06-19 1985-06-19

Publications (2)

Publication Number Publication Date
JPS622245U JPS622245U (en]) 1987-01-08
JPH0447958Y2 true JPH0447958Y2 (en]) 1992-11-12

Family

ID=30647476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985091516U Expired JPH0447958Y2 (en]) 1985-06-19 1985-06-19

Country Status (1)

Country Link
JP (1) JPH0447958Y2 (en])

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5887825A (ja) * 1981-11-20 1983-05-25 Fujitsu Ltd マイクロ波プラズマ処理装置

Also Published As

Publication number Publication date
JPS622245U (en]) 1987-01-08

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